The process scaling needs to include system-level architectures for metrology and control. This includes data acquisition and control at the levels of the process, the physical handling and the component validation. The in-line metrology and inspection for micro-/nano-production play an important role, together with a common reference system and approach across process chain. The evolution of the control system on the factory floor will also need to show various levels of distributed control in order to cover both batch-to-batch and run-to-run variations with real-time parameter prediction and feedback.

Practical industry solutions for reference metrology at these small dimensions are not readily available. However, whilst efforts are made towards producing reference materials, reliable and fast measurements that allow for control both at the process level and at the higher level of product vehicle or line, are needed. This will enable predictive management of batches, improved quality and speed control, and machine learning enabling fully autonomous control at the level of the process tool.

Scope:

Proposals should include a systems-level strategy for integrating measurement and control throughout the production line for micro-/(nano-)enabled high volume manufacturing. To address this challenge the proposal will need to cover all of the following areas:

• Measurement techniques that target highly integrated and functional products at the micro- (and nano-)scale.
• Measurement and data acquisition which are non-destructive, i.e. no waste material at the measurement steps, and allow for high throughput scenarios in their respective industrial settings.
• Traceability in the measurements back to reference samples (e.g. calibrated standard artefacts and products). Direct contributions to related standards may be a part of the proposal.
• Approaches to control at the different levels of factory integration, including process variation, product/component reliability, waste optimisation, yield/output improvements and predictive/preventive corrections to the entire line.

Activities are expected to focus on Technology Readiness Levels 5 to 7 and to be centred around TRL6.

This topic addresses cross-KET activities.

The Commission considers that proposals requesting a contribution from the EU between EUR 4 and 6 million would allow this specific challenge to be addressed appropriately. Nonetheless, this does not preclude submission and selection of proposals requesting other amounts.

Expected Impact:

The developed new technologies should lead to a significant impact in the following terms:

• Improvement in existing manufacturing processes through implementation of system-wide control systems, demonstrating better resource efficiency, yield and productivity of a wide variety of components and final products.
• Improvement in technical knowledge on the in-line metrology for micro-/(nano-)sized components in a high-volume manufacturing setting.
• Accelerated uptake by industry of in-line measurements and related control systems that allow for traceability in terms of physical dimensions, functionality and reliability of micro-/nano-sized components.
• Contribution to standardisation in the field of reference materials targeting micro-/(nano-) technology and factory integration.

Please read carefully all provisions below before the preparation of your application.

1. LIST OF COUNTRIES and APPLICABLE RULES FOR FUNDING
   described in part A of the General Annexes of the General Work Programme.
   
   Note also that a number of non-EU/non-Associated Countries that are not automatically eligible for funding have made specific provisions for making funding available for their participants in Horizon 2020 projects (follow the links to Australia, Brazil, Canada, China, Hong Kong &Macau, India, Japan, Republic of Korea, Mexico, Russia, Taiwan).
    

2. ELIGIBILITY and ADMISSIBILITY CONDITIONS
   described in part B and C of the General Annexes of the General Work Programme.
   
   Proposal page limits and layout: Please refer to Part B of the standard proposal template.
3. EVALUATION
   
   3.1  Evaluation criteria and procedure, scoring and threshold:
   
   The criteria, scoring and threshold are described in General Annex H of the work programme.
   The following exceptions apply:
   
   For single-stage and second-stage evaluations, the threshold for the criteria Excellence and Impact will be 4. The overall threshold, applying to the sum of the three individual scores, will be 12.
   
   The procedure for setting a priority order for proposals with the same score is given in General Annex H of the work programme. The following exceptions apply:
   
   Under 3 (a)
   Proposals are first ranked in separate lists according to the topics against which they were submitted (‘topic ranked lists’). When comparing ex aequo proposals from different topics, proposals having a higher position in their respective 'topic ranked list' will be considered to have a higher priority in the overall ranked list.
   
   Under 3 (b)
   For all topics and types of action, the prioritisation will be done first on the basis of the score for Impact, and then on that for Excellence.
   
   3.2 Submission and evaluation process: Guide to the submission and evaluation process
       
4. INDICATIVE TIMETABLE for EVALUATION and GRANT AGREEMENT
   
   Information on the outcome of single-stage evaluation: maximum 5 months from the deadline for submission.
   Signature of grant agreements: maximum 8 months from the deadline for submission.
    
5. PROVISIONS, PROPOSAL TEMPLATES and EVALUATION FORMS
   for the type of action under this topic
   
   Innovation Action:
   
   Specific provisions and funding rates
   Standard proposal template
   Standard evaluation form
   H2020 General MGA -Multi-Beneficiary
   Annotated Grant Agreement
    
6. ADDITIONAL PROVISIONS
   
   Horizon 2020 budget flexibility
   
   Classified information
   
   Technology readiness levels (TRL) – where a topic description refers to TRL, these definitions apply.
   
   Financial support to Third Parties – where a topic description foresees financial support to Third Parties, these provisions apply.
    
7. OPEN ACCESS
   
   Open access must be granted to all scientific publications resulting from Horizon 2020 actions.
   
   Where relevant, proposals should also provide information on how the participants will manage the research data generated and/or collected during the project, such as details on what types of data the project will generate, whether and how this data will be exploited or made accessible for verification and re-use, and how it will be curated and preserved.

   Open access to research data
   The Open Research Data Pilot has been extended to cover all Horizon 2020 topics for which the submission is opened on 26 July 2016 or later. Projects funded under this topic will therefore by default provide open access to the research data they generate, except if they decide to opt-out under the conditions described in annex L of the Work Programme. Projects can opt-out at any stage, that is both before and after the grant signature.
   
   Note that the evaluation phase proposals will not be evaluated more favourably because they plan to open or share their data, and will not be penalised for opting out.
   
   Open research data sharing applies to the data needed to validate the results presented in scientific publications. Additionally, projects can choose to make other data available open access and need to describe their approach in a Data Management Plan.
   
   - Projects need to create a Data Management Plan (DMP), except if they opt-out of making their research data open access. A first version of the DMP must be provided as an early deliverable within six months of the project and should be updated during the project as appropriate. The Commission already provides guidance documents, including a template for DMPs.

   - Eligibility of costs: costs related to data management and data sharing are eligible for reimbursement during the project duration.
   
   The legal requirements for projects participating in this pilot are in the article 29.3 of the Model Grant Agreement.

ADDITIONAL DOCUMENTS

• Legal basis: Horizon 2020 - Regulation of Establishment
• Legal basis: Horizon 2020 Rules for Participation
• Legal basis: Horizon 2020 Specific Programme
• H2020 Work Programme 2016-17: Introduction
• H2020 Work Programme 2016-17: Introduction to Leadership in enabling and industrial technologies (LEITs)
• H2020 Work Programme 2016-17: Nanotechnologies, advanced materials, advanced manufacturing and processing, biotechnology
• H2020 Work Programme 2016-17: Cross-cutting activities (Focus Areas)
• H2020 Work Programme 2016-17: Dissemination, Exploitation and Evaluation
• H2020 Work Programme 2016-17: General Annexes